T-type gas filtration system for use in gas cabinets and gas delivery systems, high-efficiency T-type inline gas filter for critical gas delivery applications

T-type gas filtration system for use in gas cabinets and gas delivery systems, high-efficiency T-type inline gas filter for critical gas delivery applications

Short Description:


  • Brand: HENGKO
  • Filter Name: T-type Gas Filter
  • Material: SS 316L
  • Flow rate: 10 ~ 120 SLPM
  • Max. operating temperature: 460° C
  • Particle removal size: > 0.003 μm
  • Product Detail

    Product Tags

    Description

    Process Gas Specialty Filter, also known as Point-to-Use Inline Filter, is specifically designed for the semiconductor industry to

    precisely remove micro-particles from UHP (Ultra-High Purity) gas streams, ensuring production purity.

     

    Its installation is simple, requiring only the connection to the gas pipeline and tightening of the nuts, avoiding welding risks and ensuring a reliable seal.

    Made entirely of premium 316L stainless steel, it features a compact and lightweight design that significantly reduces pressure loss while delivering

    exceptional particle filtration efficiency. This makes it the ideal choice for purifying process gases.

    HENGKO supplies professional OEM Point-to-Use Inline Gas Filters, tailored to meet the stringent demands of

    high-performance industrial applications. 

     

    Product Feature

    ▶ 100% 316L Stainless Steel Construction
    Ensures durability, high resistance to corrosion, and compatibility with demanding industrial environments.
    ▶ High Temperature, High Pressure, and Corrosion Resistance
    Ideal for use in extreme conditions, providing reliable performance under high temperatures and pressures.
    ▶ 100% Ammonia Leak Testing
    Each unit undergoes rigorous ammonia leak testing to guarantee safe and reliable sealing performance.
    ▶ High Flow Rate with Low Resistance
    Designed for efficient gas flow, reducing pressure loss and maintaining optimal system performance.
    ▶ Suitable for Various Process Gases
    Versatile design supports a wide range of industrial gases, making it suitable for multiple applications.
    ▶ Ultra-High Particle Capture Rate
    Ensures superior filtration performance, effectively capturing even the smallest particles for maximum purity.
    ▶ 100% Integrity Testing
    Every filter is thoroughly tested to ensure structural and operational integrity, meeting the highest quality standards.
    ▶ Ideal for Cleanroom Environments 
    Specially designed for use in cleanroom conditions, ensuring cleanliness during manufacturing, testing, and packaging processes.

    Types of Inline Gas filters for Semiconductor system

     

    Datasheet 

    Technical Parameters Value/Description
    Filter Material 316L Stainless Steel Powder Sintered
    Housing Material 316L Stainless Steel
    Helium Leak Validation Rate 2x10⁻¹⁰ cc/min
    Helium Test Leak Rate 1x10⁻¹⁰ cc/min
    Surface Treatment Outer Surface: Ra<1.6μm
      Inner Surface: Ra<0.2μm
    Maximum Operating Temperature Inert Gas: 400-500℃
      Corrosive and Reactive Gases: 50℃
    Particle Interception Efficiency ≥99.9999999% (9LRV) @30 slpm
    Downstream Cleanliness ≤0.03 particles/liter @>0.01μm, 30 slpm
    Particle Interception Size ≥0.003μm

     

     

    Size

    T-type gas filter size diagram

    Size of Inline Point to Use T-type Gas Filters 

    Product Model Connection Type and Size Filter Area Specification A B C D E F
    Z01B-00664 1/8 in. Double Ferrule 2 57.7 9.7 37.8 25.4 25.4 25.4
    Z01B-00614 1/4 in. Double Ferrule 4 62.7 9.7 37.8 25.4 25.4 25.4
    Z01B-00665 3/8 in. Double Ferrule 8 72.1 11.7 44.2 28.7 28.7 28.6
    Z01B-00666 1/2 in. Double Ferrule 8 77.2 11.7 44.2 28.7 28.7 28.6
    Z01B-00667 6 mm Double Ferrule 4 62.5 9.7 37.8 25.4 25.4 25.4
    Z01B-00668 8 mm Double Ferrule 8 72.1 11.7 44.2 28.7 28.7 28.6
    Z01B-00669 10 mm Double Ferrule 8 72.6 11.7 44.2 28.7 28.7 28.6
    Z01B-00670 12 mm Double Ferrule 8 77.2 11.7 44.2 28.7 28.7 28.6
    Z01B-00671 1/4 in. Tube Socket Weld 4 42.7 9.7 37.8 25.4 25.4 25.4
    Z01B-00672 3/8 in. Tube Socket Weld 4 42.7 9.7 37.8 25.4 25.4 25.4
    Z01B-00673 1/4 in. Tube Butt Weld 4 42.7 9.7 37.8 25.4 25.4 25.4
    Z01B-00674 3/8 in. Tube Butt Weld 4 42.7 9.7 37.8 25.4 25.4 25.4
    Z01B-00675 1/8 in. NPT Female 2 50.8 9.7 37.8 25.4 25.4 25.4
    Z01B-00676 1/4 in. NPT Female 4 54.1 9.7 37.8 25.4 25.4 25.4
    Z01B-00677 1/4 in. NPT Male 4 54.1 9.7 37.8 25.4 25.4 25.4
    Z01B-00678 3/8 in. NPT Male 8 60.5 11.7 44.2 28.7 28.7 28.6
    Z01B-00679 1/2 in. NPT Male 8 69.9 11.7 44.2 28.7 28.7 28.6
    Z01B-00680 1/4 in. VCR Male 4 58.4 9.7 37.8 25.4 25.4 25.4
    Z01B-00681 1/2 in. VCR Male 8 64.8 11.7 44.2 28.7 28.7 28.6

     

     

    Typical Applications

    For use with W-seal and C-seal, 1.125” and 1.5” surface mount modular gas delivery systems.

     

    T-type Process Gas Filtration for Semiconductor system

     

    Some common applications for T-type gas filters: 

     

    1.Semiconductor Manufacturing
    Removal of particulates from process gases to ensure clean operations in etching, deposition, and lithography processes.

    2.Pharmaceutical Production
    Filtration of gases in cleanrooms to maintain sterility and prevent contamination in sensitive environments.

    3.Food and Beverage Industry
    Purification of CO₂ and other gases used in carbonation, packaging, and preservation to prevent contamination.

    4.Petrochemical and Chemical Processing
    Ensuring clean gas streams for reactions, reducing catalyst contamination, and protecting downstream equipment.

    5.Industrial Gas Supply Systems
    Filtering industrial gases like nitrogen, oxygen, and argon to maintain gas purity for various manufacturing processes.

    6.Laboratories and Research Facilities
    Removing contaminants from gas lines to protect sensitive analytical instruments, such as gas chromatographs.

    7.Aerospace and Defense
    Purifying gases used in critical applications like rocket propulsion and pressurization systems.

    8.Power Generation
    Filtering gases in fuel cells, turbines, and other systems where gas purity is crucial for optimal performance and efficiency.

    9.Water Treatment Plants
    Filtration of gases used in aeration and ozonation to improve water quality and prevent clogging in gas distribution lines.

    10.HVAC Systems for Cleanrooms and Controlled Environments
    Maintaining clean gas flows for air conditioning and ventilation systems in controlled environments like medical and biotech facilities.

     

     

     

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