Surface Mount C Seal Filter Solutions for Efficient Gas Delivery Systems by IGS
Description
HENGKO Surface Mount Filters are designed to meet the demanding requirements of integrated gas systems used in semiconductor OEM tools. Offering industry-leading filtration at 0.003 µm, these filters ensure exceptional performance and reliability with a particle interception efficiency of ≥99.9999999% (9-LRV) at 120 slpm.
Constructed from robust 316L stainless steel powder sintered for the filter element and housing, these filters are compliant with SEMI F86-0304 specifications, featuring two-port components tailored for 1.125” gas distribution systems with a C-seal configuration. They support maximum inlet pressure of 3.4 MPa at 100°C and a maximum operating pressure differential of 0.69 MPa at 100°C.
These specialized filters, compatible with both C-type and W-type seal specifications, achieve downstream cleanliness with particle release of
With a surface finish of Ra < 1.6 µm on the exterior and Ra < 0.13 µm on the interior, they are designed to withstand high temperatures up to 460°C. Engineered for easy integration and modular design upgrades, these filters simplify installation and maintenance, helping to optimize system performance in semiconductor gas delivery and control applications.
Product Feature
▶ Overall 316L stainless steel construction
▶ Miniaturized design, compact structure, space-saving
▶ Excellent gas replacement and desorption characteristics
▶ High temperature, high pressure, and corrosion resistant
▶ Electro-polished 316L stainless steel housing
▶ Easy and efficient installation and maintenance
▶ Mechanical sealing, structurally non-welded to the medium
Datasheet
| Technical Parameters | Values |
|---|---|
| Filter Element Material | 316L Stainless Steel Sintered Powder |
| Housing Material | 316L Stainless Steel |
| Maximum Inlet Pressure | 3.4 MPa @ 100°C |
| Maximum Operating Differential | 0.69 MPa @ 100°C |
| Helium Verification Leak Rate | 1x10⁻¹¹ cc/min |
| Helium Test Leak Rate | 1x10⁻⁹ cc/min |
| Surface Treatment | Outer Surface Ra < 1.6 μm |
| Inner Surface Ra < 0.13 μm | |
| Maximum Operating Temperature | 460°C |
| Particle Interception Efficiency | ≥99.9999999% (9-LRV) @ 120 slpm (Reference MPPS, all particles) |
| Downstream Cleanliness | Particle Release: < 0.03 particles/liter (< 1 particle/ft³) |
| Volatiles: < 10 ppb moisture | |
| Particle Interception Size | ≥0.003 μm |
| Flow Range | 0 ~ 120 slpm |
Size
Here’s the part number you can order and size details :
| Product Model | Flow Rate | Height H (mm) | Filtration Precision | Cleaning Level |
|---|---|---|---|---|
| Z01B-00637 | 10 slpm | 51.6 | 0.003 μm | C |
| Z01B-00638 | 40 slpm | 82.9 | 0.003 μm | C |
| Z01B-00687 | 80 slpm | 126.2 | 0.003 μm | C |
| Z01B-00688 | 120 slpm | 167.9 | 0.003 μm | C |
Typical Applications
For use with W-seal and C-seal, 1.125” and 1.5” surface mount modular gas delivery systems.
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