Semiconductor Gas Filters are precision welded with atmosphere purification. A deionized water flush, followed by a high pressure, filtered nitrogen flush removes particles and reduces particle shedding. 316L stainless steel to construct subassemblies for use in reaction gas distribution systems. Proper selection of stainless steel melts can improve the corrosion resistance of UHP gas systems.
In the case of high purity semiconductor gas filter assemblies, it is important to specify the proper chemical composition, grain size, and inclusions. In addition, the suitability of the materials to be molded, mechanically polished and electropolished must be evaluated. Careful selection of 316L stainless steel for use in the manufacture of filter assemblies is critical.
HENGKO the high purity gas handling filtration requirements for semiconductor processing, HENGKO's high quality (sintered metal filter) products are extensively tested to ensure that they meet the critical filtration efficiency, precise flow control and safety requirements for gas delivery systems in semiconductor manufacturing.
Benefits:
Reduction in gas related defects
Custom media tailored to filter a variety of gases
Industry leading filter quality
Reduction in outgassing and particle impurities