Semiconductor Filters

Semiconductor Gas Filters:

Ensuring Impeccable Gas Purity in Chipmaking

In the intricate world of semiconductor manufacturing, where precision and purity are paramount, the quality of

gases used plays a critical role in determining the success of the process. Impurities, even at infinitesimal levels,

can wreak havoc on the delicate circuitry of microchips, rendering them defective and unusable. To safeguard

this critical process, semiconductor gas filters stand as unyielding guardians, meticulously removing contaminants

and ensuring the pristine quality of gases that flow through the manufacturing lines.

There are many excellent features and benefits of  sintered metal filters

1. Crafted in a State-of-the-Art Cleanroom Environment

These filters are born in a state-of-the-art cleanroom, an environment where immaculate conditions are meticulously maintained to minimize any potential contamination. They undergo a rigorous manufacturing process, starting with precision welding under an atmosphere of purified air. A subsequent deionized water flush, followed by a high-pressure, filtered nitrogen purge, eliminates any lingering particles and reduces the risk of particle shedding.

2. Exceptional Particle Removal Efficiency

With a remarkable filtration efficiency of 9 LRV for 0.003μm particles, adhering to the stringent standards set by SEMI F38 and ISO 12500 test methods, these filters effectively remove any corrosion-generated particles and particles generated from moving parts, ensuring the pristine purity of the gases.

3. Superior Mechanical Strength

Rigorously tested to guarantee exceptional resilience in demanding manufacturing processes and environments that often utilize high gas pressures, these filters provide unwavering performance throughout their lifespan.

4. Exceeding the Highest Industry Standards

Surpassing the stringent gas handling filtration requirements for semiconductor processing, these filters undergo rigorous testing to guarantee they meet the critical filtration efficiency, precise flow control, and safety standards demanded by gas delivery systems in semiconductor manufacturing.

5. Unwavering Commitment to Safety

To safeguard against exposure to flammable, corrosive, toxic, and pyrophoric process gases, the filter housings undergo meticulous leak testing, ensuring they achieve a remarkable leak rate of less than 1x10-9 atm scc/second. This unwavering commitment to safety ensures that hazardous gases are contained and prevented from causing harm.

6. Uncompromising Purity for Chipmaking Excellence

Through their exceptional filtration capabilities, unwavering commitment to safety, and adherence to the highest industry standards, these gas filters play a pivotal role in safeguarding the intricate process of semiconductor manufacturing. They stand as guardians of purity, ensuring that only the cleanest gases flow through the manufacturing lines, paving the way for the creation of high-performance microchips that power our modern world.

Types of Semiconductor Filters 

Semiconductor filters are used in a variety of applications, including:

* Electronics manufacturing: 

   Semiconductor filters are used to remove particles from ultrapure water, gases, and chemicals used in the manufacturing of semiconductors.

* Chemical mechanical planarization (CMP): 

  Semiconductor filters are used to remove particles from CMP slurries, which are used to polish semiconductor wafers.

* Biomedical: 

  Semiconductor filters are used to remove particles from fluids used in medical diagnostics and treatments.

* Environmental: 

   Semiconductor filters are used to remove particles from air and water.

There are four main types of semiconductor filters:

1. Membrane filters: 

Membrane filters are made of a thin, porous film that allows fluids to pass through while trapping particles.

 

Membrane filters for semiconductor

 

 

2. Depth filters: 

Depth filters are made of a thick, tortuous bed of material that traps particles as they flow through the filter.

 

Depth filters for semiconductor

 

 

3. Adsorbent filters: 

Adsorbent filters are made of a material that attracts and holds onto particles.

 

 Adsorbent filters for semiconductor 

 

 

4.  Sintered metal filters

Sintered metal filters are a type of depth filter that is commonly used in semiconductor manufacturing. They are made by sintering fine metal powder into a porous structure. Sintered metal filters are known for their high durability, high filtration efficiency, and ability to withstand high temperatures and pressures.

Advantages of sintered metal filters for semiconductor manufacturing:

* High durability: 

  Sintered metal filters are very durable and can withstand harsh operating conditions, including high temperatures, pressures, and corrosive chemicals.

 

* High filtration efficiency: 

   Sintered metal filters can remove particles down to 0.01 microns in size, which is essential for protecting delicate semiconductor components from contamination.

* Long lifespan: 

   Sintered metal filters have a long lifespan and can be easily cleaned and reused.

* Chemical compatibility: 

   Sintered metal filters are compatible with a wide range of chemicals, making them suitable for use in a variety of semiconductor manufacturing processes.

Applications of sintered metal filters in semiconductor manufacturing:

* Gas purification: 

   Sintered metal filters are used to purify gases used in semiconductor manufacturing, such as nitrogen, hydrogen, and oxygen.

* Chemical filtration: 

   Sintered metal filters are used to filter chemicals used in semiconductor manufacturing, such as acids, bases, and solvents.

* Ultrapure water filtration: 

   Sintered metal filters are used to filter ultrapure water used in semiconductor manufacturing.

* CMP slurry filtration: 

   Sintered metal filters are used to filter CMP slurries, which are used to polish semiconductor wafers.

Sintered metal filters are an essential part of the semiconductor manufacturing process, helping to ensure the production of high-quality semiconductor devices.

 

The type of semiconductor filter used in a particular application depends on the size of the particles being removed, the type of fluid being filtered, and the desired level of filtration.

Here is a table summarizing the different types of semiconductor filters:

Filter Type	Description	Applications	Image
Membrane filters	Made of a thin, porous film that allows fluids to pass through while trapping particles.	Electronics manufacturing, CMP, biomedical, environmental	Membrane filters for semiconductor
Depth filters	Made of a thick, tortuous bed of material that traps particles as they flow through the filter.	CMP, biomedical, environmental	Depth filters for semiconductor
Adsorbent filters	Made of a material that attracts and holds onto particles.	Electronics manufacturing, CMP, biomedical, environmental	Adsorbent filters for semiconductor
Sintered metal filters	Made by sintering fine metal powder into a porous structure.	Gas purification, chemical filtration, ultrapure water filtration, CMP slurry filtration	Opens in a new windowwww.hengko.com Sintered metal filters for semiconductor

Application 

Sintered metal semiconductor gas filters are widely used in a variety of applications in the semiconductor industry. Their unique properties, such as high filtration efficiency, durability, and ability to withstand high temperatures and pressures, make them an essential component of gas delivery systems in semiconductor manufacturing.

Here are some of the specific applications of sintered metal semiconductor gas filters:

1. Wafer production:

    Sintered metal filters are used to purify gases used in wafer production, such as nitrogen, hydrogen, and oxygen. These gases are essential for processes such as epitaxial growth, etching, and doping.

2. Chemical filtration:

   Sintered metal filters are used to filter chemicals used in semiconductor manufacturing, such as acids, bases, and solvents. These chemicals are used for a variety of purposes, including cleaning, etching, and polishing.

3. Ultrapure water filtration:

    Sintered metal filters are used to filter ultrapure water (UPW) used in semiconductor manufacturing. UPW is essential for cleaning and rinsing wafers, as well as for preparing chemicals.

4. CMP slurry filtration:

    Sintered metal filters are used to filter CMP slurries, which are used to polish semiconductor wafers. CMP is a critical process in the fabrication of microchips.

5. Point-of-use (POU) filtration:

    Sintered metal filters are often used as POU filters, which are installed directly at the point of use to provide the highest level of filtration. POU filters are particularly important for applications where the purity of the gas is critical, such as in the manufacture of microprocessors and other high-performance devices.

6. High-purity gas handling:

    Sintered metal filters are used in high-purity gas handling systems to remove contaminants from gases used in semiconductor manufacturing. These contaminants can include particles, moisture, and organic compounds.

7. Microelectronics manufacturing:

    Sintered metal filters are used in the manufacturing of microelectronics, such as computers, tablets, cell phones, IoT sensors, and control devices.

8. Micro-electromechanical systems (MEMS) filtration:

   Sintered metal filters are used in MEMS filtration, which is the process of removing contaminants from micro-electromechanical systems. MEMS are used in a variety of applications, including sensors, actuators, and transducers.

9. Data storage device filtration:

   Sintered metal filters are used in data storage device filtration, which is the process of removing contaminants from data storage devices, such as hard drives and solid-state drives.

In addition to these specific applications, sintered metal semiconductor gas filters are also used in a variety of other applications in the semiconductor industry. Their versatility and reliability make them an essential tool for semiconductor manufacturers.

Looking for top-quality sintered metal semiconductor gas filters?

HENGKO is your go-to partner for OEM solutions in semiconductor manufacturing systems.

Our precision-engineered filters ensure reliability and efficiency in your processes, offering you the edge in a competitive market.

Why Choose HENGKO's Filters?

* Superior quality and durability
* Customized solutions to fit your specific needs
* Enhanced performance for semiconductor manufacturing

Don't let filtration challenges hold back your production.

Reach out to us today to explore how our sintered metal filters can revolutionize your manufacturing system.

 Contact us at ka@hengko.com

Partner with HENGKO and take a step towards excellence in semiconductor manufacturing!