High Purity Gas Filtration Solutions for the Semiconductor Industry
Description
High Flow Gas Filter – Specifically designed for ultra-high purity process gas filtration in semiconductor manufacturing. Precision-engineered from 316L stainless steel, it features a multi-column or stacked disk media design to ensure low resistance at high flow rates, with filtration accuracy reaching 0.003μm to meet ultra-high purity requirements. The all-metal construction makes it an ideal filtration solution for high-temperature dynamic environments.
Product Feature
▶ All 316L Stainless Steel Structure — Ensures durability and resistance to corrosion.
▶ High Flow Rate, Low Resistance — Optimized for high flow with minimal pressure loss.
▶ Ultra-High Particle Retention Efficiency — Excellent for maintaining ultra-pure conditions.
▶ Resistant to High Temperatures, Pressure, and Corrosion — Suitable for harsh environments.
▶ Compatible with Various Process Gases — Versatile for multiple industrial applications.
▶ Ideal for Cleanroom Manufacturing, Testing, and Packaging — Perfect for use in controlled environments.
▶ 100% Integrity Testing — Each filter undergoes comprehensive integrity testing for quality assurance.
▶ 100% Helium Leak Testing — Verified through helium leak testing to ensure reliability in critical applications.
Datasheet
Technical Parameters
| Parameter | Specification |
|---|---|
| Filter Element Material | 316L stainless steel powder sintered |
| Housing Material | 316L stainless steel |
| Max Inlet Pressure | 207 bar |
| Max Operating Differential Pressure | 5.2 bar |
| Helium Validation Leak Rate | 2 x 10⁻¹⁰ cc/min |
| Helium Testing Leak Rate | 1 x 10⁻¹⁰ cc/min |
| Surface Treatment | |
| External Surface | Ra < 1.6 μm |
| Internal Surface | Ra < 0.2 μm |
| Max Operating Temperature | |
| Inert Gas | 400-500℃ |
| Corrosive & Reactive Gas | 50℃ |
| Particle Retention Efficiency | ≥99.9999999% (9LRV) @ 30 slpm |
| Downstream Cleanliness | ≤0.03 particles/liter @ > 0.01 μm, 30 slpm |
| Particle Retention Size | ≥0.003 μm |
Size
Here’s the part number you can order and size details :
| Product Model | Filter Element Material | Filtration Accuracy (μm) | Connection Type |
|---|---|---|---|
| Z01B-00647 | 316L Stainless Steel | 10~0.003 | 1/4” |
| Z01B-00648 | 316L Stainless Steel | 10~0.003 | 1/2” |
| Z01B-00649 | 316L Stainless Steel | 10~0.003 | 1/8” |
| Z01B-00650 | 316L Stainless Steel | 10~0.003 | 1” |
| Customizable | 316L Stainless Steel | 10~0.003 | As Needed |
Typical Applications
some typical applications of High Purity Bulk and Utility Filters and Gas Flow Stream Filters at the Gas Pad:
1.Semiconductor Manufacturing
*Ensures ultra-pure gas supply for wafer fabrication, etching, and chemical vapor deposition (CVD) processes.
*Maintains high purity in bulk gas distribution systems for nitrogen, argon, and other carrier gases.
2.Pharmaceutical Production
*Provides sterile and particle-free gas for critical manufacturing environments.
*Supports high-purity filtration for cleanrooms and controlled environments to maintain product integrity.
3.Laboratory Gas Systems
*Used in lab settings to purify gas streams in analytical equipment like gas chromatography and mass spectrometry.
*Ensures high-purity gases for research and testing applications, protecting sensitive instruments.
4.Food and Beverage Processing
*Filters CO₂ and other gases used in carbonation, packaging, and storage, maintaining food safety and quality.
*Ensures contamination-free gas supply in processing plants, particularly for bulk gas utilities.
5.Oil and Gas Industry
*Purifies natural gas streams in gas pad filtration, removing contaminants before storage or transport.
*Protects downstream equipment by removing particulates, moisture, and impurities in high-pressure gas flow systems.
6.Chemical Manufacturing
*Filters utility gases like nitrogen and argon used in chemical synthesis and reactions.
*Maintains gas purity to prevent contamination and reaction inconsistencies.
7.Aerospace and Defense
*Delivers high-purity gases in manufacturing and testing environments for aerospace materials and components.
*Ensures consistent gas purity in controlled environments for aircraft and defense equipment assembly.
8.Energy Production (Power Plants)
*Filters high-pressure gases for cooling and process applications, especially in high-temperature settings.
*Enhances efficiency and reduces equipment wear by preventing contamination in gas cooling and flow systems.
These filters are essential in any application requiring clean, consistent gas flow, enhancing equipment protection,
process efficiency, and final product quality across industries.
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