High Purity Bulk and Utility Filters for Semiconductor Industry

High Purity Bulk and Utility Filters for Semiconductor Industry

Short Description:


  • Brand: HENGKO
  • Filter Name: High Purity Bulk and Utility Filters
  • Material: SS 316L
  • Flow rate: 10 ~ 120 SLPM
  • Max. operating temperature: 400-500° C
  • Particle removal size: > 0.003 μm
  • Product Detail

    Product Tags

    Description

    High Flow Gas Filter – Specifically designed for ultra-high purity process gas filtration in semiconductor manufacturing. Precision-engineered from 316L stainless steel, it features a multi-column or stacked disk media design to ensure low resistance at high flow rates, with filtration accuracy reaching 0.003μm to meet ultra-high purity requirements. The all-metal construction makes it an ideal filtration solution for high-temperature dynamic environments.

     

    Product Feature

    All 316L Stainless Steel Structure — Ensures durability and resistance to corrosion.
    High Flow Rate, Low Resistance — Optimized for high flow with minimal pressure loss.
    Ultra-High Particle Retention Efficiency — Excellent for maintaining ultra-pure conditions.
    Resistant to High Temperatures, Pressure, and Corrosion — Suitable for harsh environments.
    Compatible with Various Process Gases — Versatile for multiple industrial applications.
    Ideal for Cleanroom Manufacturing, Testing, and Packaging — Perfect for use in controlled environments.
    100% Integrity Testing — Each filter undergoes comprehensive integrity testing for quality assurance.
    100% Helium Leak Testing — Verified through helium leak testing to ensure reliability in critical applications.

     

    High Purity Bulk and Utility Filters OEM for sale

     

    Datasheet

    Technical Parameters

    Parameter Specification
    Filter Element Material 316L stainless steel powder sintered
    Housing Material 316L stainless steel
    Max Inlet Pressure 207 bar
    Max Operating Differential Pressure 5.2 bar
    Helium Validation Leak Rate 2 x 10⁻¹⁰ cc/min
    Helium Testing Leak Rate 1 x 10⁻¹⁰ cc/min
    Surface Treatment  
    External Surface Ra < 1.6 μm
    Internal Surface Ra < 0.2 μm
    Max Operating Temperature  
    Inert Gas 400-500℃
    Corrosive & Reactive Gas 50℃
    Particle Retention Efficiency ≥99.9999999% (9LRV) @ 30 slpm
    Downstream Cleanliness ≤0.03 particles/liter @ > 0.01 μm, 30 slpm
    Particle Retention Size ≥0.003 μm

     

    Size

    High Purity Bulk and Utility Filters OEM Size

    Here’s the part number you can order and size details :

    Product Model Filter Element Material Filtration Accuracy (μm) Connection Type
    Z01B-00647 316L Stainless Steel 10~0.003 1/4”
    Z01B-00648 316L Stainless Steel 10~0.003 1/2”
    Z01B-00649 316L Stainless Steel 10~0.003 1/8”
    Z01B-00650 316L Stainless Steel 10~0.003 1”
    Customizable 316L Stainless Steel 10~0.003 As Needed

     

    Typical Applications

    some typical applications of High Purity Bulk and Utility Filters and Gas Flow Stream Filters at the Gas Pad:

    1.Semiconductor Manufacturing

    *Ensures ultra-pure gas supply for wafer fabrication, etching, and chemical vapor deposition (CVD) processes.
    *Maintains high purity in bulk gas distribution systems for nitrogen, argon, and other carrier gases.

    2.Pharmaceutical Production

    *Provides sterile and particle-free gas for critical manufacturing environments.
    *Supports high-purity filtration for cleanrooms and controlled environments to maintain product integrity.

    3.Laboratory Gas Systems

    *Used in lab settings to purify gas streams in analytical equipment like gas chromatography and mass spectrometry.
    *Ensures high-purity gases for research and testing applications, protecting sensitive instruments.

    4.Food and Beverage Processing

    *Filters CO₂ and other gases used in carbonation, packaging, and storage, maintaining food safety and quality.
    *Ensures contamination-free gas supply in processing plants, particularly for bulk gas utilities.

    5.Oil and Gas Industry

    *Purifies natural gas streams in gas pad filtration, removing contaminants before storage or transport.
    *Protects downstream equipment by removing particulates, moisture, and impurities in high-pressure gas flow systems.

    6.Chemical Manufacturing

    *Filters utility gases like nitrogen and argon used in chemical synthesis and reactions.
    *Maintains gas purity to prevent contamination and reaction inconsistencies.

    7.Aerospace and Defense

    *Delivers high-purity gases in manufacturing and testing environments for aerospace materials and components.
    *Ensures consistent gas purity in controlled environments for aircraft and defense equipment assembly.

    8.Energy Production (Power Plants)

    *Filters high-pressure gases for cooling and process applications, especially in high-temperature settings.
    *Enhances efficiency and reduces equipment wear by preventing contamination in gas cooling and flow systems.

    These filters are essential in any application requiring clean, consistent gas flow, enhancing equipment protection,

    process efficiency, and final product quality across industries.

     

    High Purity Bulk and Utility Filters for Semiconductor Industry

     

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