Custom IGS Surface Mount C Seal Filters for Advanced Gas Delivery Systems in Semiconductors

Custom IGS Surface Mount C Seal Filters for Advanced Gas Delivery Systems in Semiconductors

Short Description:


  • Brand: HENGKO
  • Filter Name: IGS Surface Mount C-Seal Filter
  • Material: SS 316L
  • Flow rate: 10 ~ 120 SLPM
  • Max. operating temperature: 460° C
  • Particle removal size: > 0.003 μm
  • Product Detail

    Product Tags

    Description

    HENGKO Surface Mount Filters are designed to meet the demanding requirements of integrated gas systems used in semiconductor OEM tools. Offering industry-leading filtration at 0.003 µm, these filters ensure exceptional performance and reliability with a particle interception efficiency of ≥99.9999999% (9-LRV) at 120 slpm.

    Constructed from robust 316L stainless steel powder sintered for the filter element and housing, these filters are compliant with SEMI F86-0304 specifications, featuring two-port components tailored for 1.125” gas distribution systems with a C-seal configuration. They support maximum inlet pressure of 3.4 MPa at 100°C and a maximum operating pressure differential of 0.69 MPa at 100°C.

    These specialized filters, compatible with both C-type and W-type seal specifications, achieve downstream cleanliness with particle release of

    With a surface finish of Ra < 1.6 µm on the exterior and Ra < 0.13 µm on the interior, they are designed to withstand high temperatures up to 460°C. Engineered for easy integration and modular design upgrades, these filters simplify installation and maintenance, helping to optimize system performance in semiconductor gas delivery and control applications.

     

    Product Feature

    ▶ Overall 316L stainless steel construction
    ▶ Miniaturized design, compact structure, space-saving
    ▶ Excellent gas replacement and desorption characteristics
    ▶ High temperature, high pressure, and corrosion resistant
    ▶ Electro-polished 316L stainless steel housing
    ▶ Easy and efficient installation and maintenance
    ▶ Mechanical sealing, structurally non-welded to the medium

     

    High-Performance IGS Surface Mount C Seal Filters for Semiconductor Gas Delivery Systems

     

    Datasheet

    Technical Parameters Values
    Filter Element Material 316L Stainless Steel Sintered Powder
    Housing Material 316L Stainless Steel
    Maximum Inlet Pressure 3.4 MPa @ 100°C
    Maximum Operating Differential 0.69 MPa @ 100°C
    Helium Verification Leak Rate 1x10⁻¹¹ cc/min
    Helium Test Leak Rate 1x10⁻⁹ cc/min
    Surface Treatment Outer Surface Ra < 1.6 μm
      Inner Surface Ra < 0.13 μm
    Maximum Operating Temperature 460°C
    Particle Interception Efficiency ≥99.9999999% (9-LRV) @ 120 slpm (Reference MPPS, all particles)
    Downstream Cleanliness Particle Release: < 0.03 particles/liter (< 1 particle/ft³)
      Volatiles: < 10 ppb moisture
    Particle Interception Size ≥0.003 μm
    Flow Range 0 ~ 120 slpm

     

    Size

    size of Surface Mount Filters

    Here’s the part number you can order and size details :

    Product Model Flow Rate Height H (mm) Filtration Precision Cleaning Level
    Z01B-00637 10 slpm 51.6 0.003 μm C
    Z01B-00638 40 slpm 82.9 0.003 μm C
    Z01B-00687 80 slpm 126.2 0.003 μm C
    Z01B-00688 120 slpm 167.9 0.003 μm C

     

    Typical Applications

    For use with W-seal and C-seal, 1.125” and 1.5” surface mount modular gas delivery systems.

     

    IGS Filters low-profile Surface Mount C Seal Filter Gas Delivery Systems for Semiconductor

     

     

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