Achieve Ultra-Pure Gas Filtration for Semiconductor Manufacturing and Ensure Contaminant-Free Production with Inline Gas Filters
Description
Process Gas Specialty Filter, also known as Point-to-Use Inline Filter, is specifically designed for the semiconductor industry to
precisely remove micro-particles from UHP (Ultra-High Purity) gas streams, ensuring production purity.
Its installation is simple, requiring only the connection to the gas pipeline and tightening of the nuts, avoiding welding risks and ensuring a reliable seal.
Made entirely of premium 316L stainless steel, it features a compact and lightweight design that significantly reduces pressure loss while delivering
exceptional particle filtration efficiency. This makes it the ideal choice for purifying process gases.
HENGKO supplies professional OEM Point-to-Use Inline Gas Filters, tailored to meet the stringent demands of
high-performance industrial applications.
Product Feature
▶ 100% 316L Stainless Steel Construction
Ensures durability, high resistance to corrosion, and compatibility with demanding industrial environments.
▶ High Temperature, High Pressure, and Corrosion Resistance
Ideal for use in extreme conditions, providing reliable performance under high temperatures and pressures.
▶ 100% Ammonia Leak Testing
Each unit undergoes rigorous ammonia leak testing to guarantee safe and reliable sealing performance.
▶ High Flow Rate with Low Resistance
Designed for efficient gas flow, reducing pressure loss and maintaining optimal system performance.
▶ Suitable for Various Process Gases
Versatile design supports a wide range of industrial gases, making it suitable for multiple applications.
▶ Ultra-High Particle Capture Rate
Ensures superior filtration performance, effectively capturing even the smallest particles for maximum purity.
▶ 100% Integrity Testing
Every filter is thoroughly tested to ensure structural and operational integrity, meeting the highest quality standards.
▶ Ideal for Cleanroom Environments
Specially designed for use in cleanroom conditions, ensuring cleanliness during manufacturing, testing, and packaging processes.
Datasheet
| Technical Parameters | Value/Description |
|---|---|
| Filter Material | 316L Stainless Steel Powder Sintered |
| Housing Material | 316L Stainless Steel |
| Helium Leak Validation Rate | 2x10⁻¹⁰ cc/min |
| Helium Test Leak Rate | 1x10⁻¹⁰ cc/min |
| Surface Treatment | Outer Surface: Ra＜1.6μm |
| Inner Surface: Ra＜0.2μm | |
| Maximum Operating Temperature | Inert Gas: 400-500℃ |
| Corrosive and Reactive Gases: 50℃ | |
| Particle Interception Efficiency | ≥99.9999999% (9LRV) @30 slpm |
| Downstream Cleanliness | ≤0.03 particles/liter @＞0.01μm, 30 slpm |
| Particle Interception Size | ≥0.003μm |
Size
Size of Inline Point to Use Gas Filters
| Filter Type | Filter Area Specification |
Sintered Type Filter Area (mm2 ) |
Mesh Type Filter Area (mm2 ) |
|---|---|---|---|
| Inline | 2 | 350 | / |
| Inline | 4 | 830 | 640 |
| Inline | 8 | 1280 | 1090 |
| T-Type | 2 | 830 | 640 |
| T-Type | 4 | 830 | 640 |
| T-Type | 8 | 1280 | 1090 |
| Integrated | / | / | 254 |
Typical Applications
For use with W-seal and C-seal, 1.125” and 1.5” surface mount modular gas delivery systems.
some potential application ideas for inline point use gas filters, focusing on industrial and specialized environments:
1. Compressed Air Systems
*Application: Inline gas filters can be used to remove particulate matter, oil, and water vapor from compressed air systems.
*Industry: Manufacturing, automotive, pharmaceutical, and food processing.
*Benefits: Ensures clean air for pneumatic tools and equipment, extending their lifespan and maintaining product quality.
2.Medical and Pharmaceutical Gas Delivery
*Application: Filters in oxygen, nitrogen, or anesthetic gas lines to remove impurities before they reach patients or sensitive instruments.
*Industry: Hospitals, medical device manufacturers, and pharmaceutical companies.
*Benefits: Prevents contamination in critical medical gases and ensures the safety of patients and precision in pharmaceutical processes.
3. Natural Gas Processing and Distribution
*Application: Inline filters for removing particulates, water, and other contaminants from natural gas at various stages of distribution.
*Industry: Oil & Gas, energy utilities.
*Benefits: Increases efficiency of gas turbines, ensures cleaner combustion, and prevents damage to downstream equipment.
4.Biogas and Biomethane Production
*Application: Filters are used to purify biogas by removing hydrogen sulfide (H₂S), siloxanes, and other contaminants before use as a fuel.
*Industry: Renewable energy, agriculture, and waste management.
*Benefits: Improves gas quality for energy production and protects generators or engines from corrosion.
5.Food and Beverage CO₂ Gas Systems
*Application: Inline filters ensure the purity of CO₂ gas used in carbonation, packaging, or dispensing beverages like beer and soft drinks.
*Industry: Food & Beverage manufacturing, breweries, and bottling plants.
*Benefits: Maintains flavor integrity and prevents contamination during production or bottling.
6.Semiconductor Manufacturing
*Application: Filters in specialty gas lines (e.g., argon, nitrogen, helium) to maintain ultra-pure gases for semiconductor fabrication.
*Industry: Electronics, semiconductors, and cleanroom environments.
*Benefits: Ensures the production of high-purity chips and electronic components by removing impurities that could cause defects.
7.Petrochemical and Chemical Plants
*Application: Inline filters remove particulates and aerosols from gas streams used in reactors and other processes.
*Industry: Chemical manufacturing, petroleum refineries.
*Benefits: Protects reactors and sensitive equipment from corrosion or clogging, ensuring efficient and safe operation.
8.Laboratory Gas Systems
*Application: Inline gas filters for ensuring the purity of gases like hydrogen, nitrogen, and helium in analytical instruments like Gas Chromatographs (GC).
*Industry: Analytical labs, research & development, and academia.
*Benefits: Improves accuracy and reliability of results by preventing contaminants from interfering with analysis.
9.HVAC and Building Management Systems
*Application: Inline gas filters can be installed in gas lines used for HVAC systems to ensure clean combustion and prevent pollutants from entering buildings.
*Industry: Commercial buildings, residential complexes, and HVAC system installers.
*Benefits: Improves air quality, energy efficiency, and system reliability.
10.High-Purity Gas Systems in Pharmaceutical Manufacturing
*Application: Inline filters ensure that gases like nitrogen, oxygen, and other process gases remain ultra-pure during drug production.
*Industry: Pharmaceutical manufacturing.
*Benefits: Protects the integrity of pharmaceutical products, reduces contamination risks, and meets stringent regulatory standards.
11.Breathing Air Systems
*Application: Inline filters in SCBA (Self-Contained Breathing Apparatus) and diving gas systems to ensure clean air for safety in hazardous environments.
*Industry: Firefighting, diving, and mining industries.
*Benefits: Provides clean, safe air in dangerous or confined environments, protecting the health and safety of workers.
12.Hydrogen Fuel Systems
*Application: Inline filters for hydrogen gas used in fuel cells, ensuring the removal of contaminants that could affect fuel cell performance.
*Industry: Renewable energy, automotive (hydrogen fuel cell vehicles), and aerospace.
*Benefits: Improves fuel cell efficiency and lifespan, and enhances energy output in renewable applications.
These applications showcase the versatility of inline gas filters across various industries, helping to ensure the purity,
efficiency, and safety of gas systems in critical processes.
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